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FSU-8 negative fluorinated photoresist

FSU-8 negative fluorinated photoresist

The new fluorine-containing FSU-8 photoresist is a negative-tone, epoxy-based, near-ultraviolet photoresist, with the advantages of traditional SU-8 photoresist: suitable for the preparation of high aspect ratio microstructures, can be obtained with vertical side wall and high aspect ratio thick film graphics; it also has good mechanical properties, chemical resistance and thermal stability. FSU-8 contains a large number of C-F bonds, which can further increase the corrosion resistance and weather resistance of the material, and has extremely low optical loss, low birefringence, and high stability at communication wavelengths (850, 1310, 1550nm). The refractive index of the material is adjustable in the range of 1.483 to 1.588, and it is suitable for making optical communication, modulation, transmission and other devices such as arrayed optical waveguides, gratings, and straight waveguides.
FSU-8 negative fluorinated photoresist
Details

Specification:Meet the following criteria

Project

Index

Appearance

Colorless transparent liquid

Refractive Index(n20D

1.5154

Optical loss

0.21dB/cm(1550 nm)

Viscosity(pa.s,25℃)

250

Film thickness(μm)

0.5-200

Degree of polymerization

4-8

Packaging

100ml、250ml、500ml

 

The new fluorine-containing FSU-8 photoresist is a negative-tone, epoxy-based, near-ultraviolet photoresist, with the advantages of traditional SU-8 photoresist: suitable for the preparation of high aspect ratio microstructures, can be obtained with vertical side wall and high aspect ratio thick film graphics; it also has good mechanical properties, chemical resistance and thermal stability. FSU-8 contains a large number of C-F bonds, which can further increase the corrosion resistance and weather resistance of the material, and has extremely low optical loss, low birefringence, and high stability at communication wavelengths (850, 1310, 1550nm). The refractive index of the material is adjustable in the range of 1.483 to 1.588, and it is suitable for making optical communication, modulation, transmission and other devices such as arrayed optical waveguides, gratings, and straight waveguides.

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Keywords:Bromides,Oilfield Drilling Products,Dye Intermediates,Brominated Flame Retardant

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